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Overview of oil diffusion pump
1, oil diffusion pump Overview: Oil diffusion pump works with the steam jet pump is similar, but also by high-speed steam jet to carry gas to achieve the purpose of vacuum, so there will be similar characteristics of steam jet pump. The difference is that the diffusion pump works in a high vacuum area and is the main equipment for achieving high vacuum. The working pressure range of 10-2 ~ 10-6pa. Widely used in vacuum smelting, vacuum coating, space simulation tests and some of the vacuum system insensitive to oil pollution. 2, the oil diffusion pump working principle and structure: When the oil vapor from the umbrella nozzle (such as I-level nozzle) to the supersonic jet out, it's faster and faster, pressure and density is slowly reduced, the jet The upper part of the evacuated gas A is diffused into the steam jet due to the density difference and is carried by the jet to a water-cooled pump wall B where the working steam is mostly condensed into oil droplets and flows back along the pump wall to the oil pan Utilization, and was pumping gas in the B accumulation, compression, and finally carried by the lower jet, so that you can level by level compression, the last stage pump away. 3, oil diffusion pump development history: History In 1915, the German physicist W. Gatde has published his study of diffusion pump report. In 1916, American I. Langmuir made a condensate pump with a cooling system at the pump wall. These pumps use mercury vapor as a working medium and can eventually achieve a vacuum of 10-5 Pa. In 1928, the British CD Bolch found high-boiling petroleum derivatives. In 1936, CD Hickman and others made synthetic oil. Both oils have a very low saturated vapor pressure at room temperature, displacing mercury as the working fluid for diffusion pumps. Since then, the oil diffusion pump has been widely used in industrial production and scientific experiments in the field of high vacuum and laid the foundation of high vacuum technology. Since the 1960s, there have been new changes in oil diffusion pumps. The main improvements are: â‘ pump deflated material with a small amount of stainless steel. â‘¡ The use of saturated vapor pressure is very low, good thermal stability of the oil, such as polyphenylene ether and silicone oil for the working fluid pump. â‘¢ to change the structure, the new oil diffusion pump in the pump inlet flange constant and not excessive increase in pump size conditions, the lower part of the flange to significantly expand the pump chamber section, the pumping rate can be increased 20 ~ 40%. If installed here a large diameter diffusion nozzle and large diameter liquid nitrogen cooling oil cap and so on. The pump can pump the usual rate (that does not expand the pump section of the pump) pumping rate, and more completely overcome the pump back to get less than 10-8 Pa clean super-high. Therefore, the oil diffusion pump in the ultra-high vacuum cleaning industrial production and scientific testing has also made an important position.