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Manz vertical vacuum coating system enhances the efficiency of crystalline silicon solar cells
Manz is a global leader in high-tech manufacturing, and with the introduction of the VCS 1200 PECVD vertical vacuum coating system, we have officially expanded into the vacuum coating market. This advanced system is designed for vertical and front-side coating of crystalline silicon solar cells, enabling effective passivation of the protective layer. The launch of this technology marks a significant milestone, as it demonstrates our mastery of all critical steps in the production of fully automated crystalline silicon solar cells. Additionally, we are now capable of delivering integrated solutions that help customers optimize their processes, enhance efficiency, and reduce both investment and operational costs.
One of the standout features of the VCS 1200 PECVD is its ability to achieve optimal passivation using silicon nitride and aluminum oxide layers, all in a single step. This not only simplifies the process but also improves performance. The use of a high-efficiency plasma source ensures superior passivation quality and long-term stability during coating. Moreover, the innovative Manz Coating Carrier System, combined with vertical cell positioning, eliminates shading or pinning issues commonly caused by mechanical positioning methods used by other manufacturers. This approach enhances coating uniformity and minimizes defects such as unwanted particle deposition before or during the process. These improvements play a crucial role in lowering production costs and enabling higher profitability in the next generation of high-efficiency solar cells.
**Technology drives efficiency**
The backside passivation process in PERC solar cells typically involves three key steps: first, a chemical wet etch to prepare one side of the cell, followed by plasma-assisted chemical vapor deposition (PACVD) to form an aluminum oxide and silicon nitride layer. Finally, a laser opens the insulating stack to create local contacts on the back of the cell. Our VCS 1200 PECVD uses aluminum oxide for backside passivation, offering two major advantages. First, the protective layer reflects long-wavelength light back into the cell, improving photoelectric conversion efficiency. Second, aluminum oxide enhances charge carrier lifetime, boosting both current and voltage, which directly increases the cell’s overall performance. As a result, our core technology covers all these steps and positions us as the only equipment supplier able to help customers implement meaningful efficiency improvements.
**Boost profits on existing lines**
Developed by Manz Coating GmbH, established in 2010, the VCS 1200 can produce up to 1,200 wafers per hour and seamlessly integrates with existing production lines. General Manager Mathias Höfler stated, “Our rapid market entry was made possible by hiring 50 highly skilled engineers at our Karlstein facility. With the VCS 1200, we now provide every essential process step for crystalline silicon solar cell production.â€
This system offers battery manufacturers a powerful opportunity to increase revenue. Dieter Manz, founder and CEO, added, “We understand the challenge facing the solar industry: reducing cost per watt for all manufacturers. PECVD is a proven solution that helps customers cut both capital and operating expenses.â€